Semiconductor device with through silicon via and alignment mark

ABSTRACT

A semiconductor device includes: a plurality of semiconductor chips stacked on each other, each of the plurality of semiconductor chips having a semiconductor substrate and a wiring layer; a through electrode penetrating the semiconductor substrate in a thickness direction and electrically connected to each other between the semiconductor chips adjacent to each other; a conductor penetrating the semiconductor substrate in the thickness direction and not electrically connected between the other semiconductor chips; and an insulating separator penetrating the semiconductor substrate in the thickness direction and formed in a shape of a ring surrounding the conductor.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of application Ser. No. 13/427,960filed on Mar. 23, 2012, which claims priority from Japanese patentapplication No. 2011-086330, filed on Apr. 8, 2011, the disclosure ofwhich is incorporated herein in its entirety by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device having aconductor usable for registration and a method for fabricating asemiconductor device.

2. Description of the Related Art

In recent, with the downsizing of electronic devices or the provision ofhigher functionalities for electronic devices, a CoC (Chip on Chip)semiconductor device has been developed, including a chip stacked bodyformed of a plurality of semiconductor chips stacked on each other. Inthe CoC semiconductor device, the registration of semiconductor chips,that is, the alignment of semiconductor chips is performed in stackingsemiconductor chips on each other.

FIGS. 2B and 3 in JP2005-217071A disclose alignment marks for use inaligning semiconductor chips. A semiconductor chip described inJP2005-217071A is a chip for a multichip semiconductor device having twoor more conductive through plugs. One or more plugs among a plurality ofthrough plugs are used for alignment marks. In other words, thealignment mark is formed of the same conductive member as the conductivemember of the through plug, a metal material, for example. Thisalignment mark can be identified on the front and back surface of thechip. Thus, the alignment mark can be fabricated by the same processsteps as the process steps for the through plug.

The alignment mark described in JP2005-217071A is fabricated by the sameprocess steps as the process steps for the through plug. Therefore, thealignment mark is made of the same metal material as the metal materialof the through plug, copper, for example. The inventor found that thecharacteristics of a semiconductor element formed on a semiconductorsubstrate sometimes deteriorate when metal atoms forming an alignmentmark diffuse into the semiconductor substrate.

For example, in the case where a semiconductor chip is a memory chiplike a DRAM, electric charges stored in a capacitor as a semiconductorelement tend to leak which is caused by metal impurity in asemiconductor substrate. Thus, the data hold time of the DRAM isshortened. Therefore, in a semiconductor chip including alignment marksformed of a conductive member, it is desirable to suppress deteriorationof device characteristics caused by diffusion of atoms that form theconductive member.

p In one embodiment, a semiconductor device includes: a semiconductorsubstrate having a first surface and a second surface located oppositeto each other in a thickness direction; a semiconductor element formedon the first surface of the semiconductor substrate; a through electrodepenetrating the semiconductor substrate from the first surface to thesecond surface and electrically connected to the semiconductor element;a conductor penetrating the semiconductor substrate from the firstsurface to the second surface and not electrically connected to thesemiconductor element; and an insulating separator penetrating thesemiconductor substrate from the first surface to the second surface andformed in a ring so as to surround the conductor.

In another embodiment, a semiconductor device includes: a plurality ofsemiconductor chips stacked on each other, each of the plurality ofsemiconductor chips having a semiconductor substrate and a wiring layer;a through electrode penetrating the semiconductor substrate in athickness direction and electrically connected to each other between thesemiconductor chips adjacent to each other; a conductor penetrating thesemiconductor substrate in the thickness direction and not electricallyconnected between the other semiconductor chips; and an insulatingseparator penetrating the semiconductor substrate in the thicknessdirection and formed in a ring so as to surround the conductor.

In other embodiment, a method for fabricating a semiconductor device,comprising: preparing a first semiconductor chip having a conductor anda insulating separator, the conductor penetrating the firstsemiconductor chip in a thickness direction and being not electricallyconnected to any element formed on the first semiconductor chip, theinsulating separator penetrating the first semiconductor chip in thethickness direction and being formed in a ring so as to surround theconductor; aligning a second semiconductor chip with the firstsemiconductor chip by using the conductor of the first semiconductorchip; and stacking the second semiconductor chip on the firstsemiconductor chip.

According to the semiconductor devices in the foregoing configurationsand the method for fabricating the same, it is possible to use theconductor not electrically connected to the semiconductor element for analignment mark. Moreover, the ring-shaped insulating separatorsurrounding the conductor prevents atoms that form the conductor fromdiffusing into the semiconductor substrate. Thus, it is possible tosuppress the deterioration of the characteristics of a semiconductorelement caused by the diffusion of atoms.

BRIEF DESCRIPTION OF THE DRAWINGS

The above features and advantages of the present invention will be moreapparent from the following description of certain preferred embodimentstaken in conjunction with the accompanying drawings, in which:

FIG. 1 is a plan view schematically illustrating a semiconductor chipaccording to a first embodiment;

FIG. 2 is a schematic diagram illustrating the configurations ofportions around a through electrode and an alignment mark part in thesemiconductor chip according to the first embodiment;

FIG. 3 is a cross sectional view illustrating the semiconductor chipalong line 3A-3A shown in FIG. 2;

FIGS. 4A to 4C are diagrams illustrating the process steps offabricating the semiconductor chip according to the first embodiment;

FIGS. 5A and 5B are diagrams illustrating steps performed subsequent toFIG. 4C;

FIGS. 6A and 6B are diagrams illustrating steps performed subsequent toFIG. 5B;

FIGS. 7A and 7B are diagrams illustrating steps performed subsequent toFIG. 6B;

FIG. 8 is a diagram illustrating steps performed subsequent to FIG. 7B;

FIG. 9 is a schematic diagram illustrating the configurations ofportions around a through electrode and an alignment mark part in asemiconductor chip according to a second embodiment;

FIG. 10 is a schematic diagram illustrating the configurations ofportions around a through electrode and an alignment mark part in asemiconductor chip according to a third embodiment;

FIG. 11 is a diagram illustrating a step of the process steps offabricating the semiconductor chip according to the third embodiment;

FIGS. 12A and 12B are a diagrams illustrating steps performed subsequentto FIG. 11;

FIGS. 13A and 13B are diagrams illustrating steps performed subsequentto FIG. 12B;

FIG. 14A is a schematic cross sectional view illustrating asemiconductor device using a semiconductor chip according to anembodiment of the present invention; and

FIG. 14B is an enlarged diagram illustrating region 14 b in FIG. 14A.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The invention will be now described herein with reference toillustrative embodiments. Those skilled in the art will recognize thatmany alternative embodiments can be accomplished using the teachings ofthe present invention and that the invention is not limited to theembodiments illustrated for explanatory purposes.

FIG. 1 is a plan view schematically illustrating a semiconductor chipaccording to a first embodiment. FIG. 2 is a schematic enlarged diagramillustrating region A shown in FIG. 1. FIG. 3 is a cross sectional viewillustrating the semiconductor chip along line 3A-3A shown in FIG. 2.

The semiconductor chip has semiconductor substrate 10, through electrode20 penetrating semiconductor substrate 10, alignment mark part 40, andcylindrical insulating films 30 and 50 of electrical insulatingproperties.

For the material of semiconductor substrate 10, a semiconductor like asilicon substrate, for example, can be used. Semiconductor substrate 10is formed with a functional element according to the function of thesemiconductor chip, that is, semiconductor element 80. Functionalelement 80 is supplied with electric power from through electrode 20.

Functional element 80 is provided in device region B on a surfaceopposite one surface of the semiconductor substrate shown in FIG. 1. Inthe case where the semiconductor chip is a chip for a DRAM, functionalelement 80 is formed of a transistor and a capacitor disposed in serieswith the transistor.

Through electrode 20 and an alignment mark part, that is, metal post 40are exposed in at least one surface of the semiconductor chip. In theexample shown in FIG. 3, insulating layer 62 is formed on one surface ofthe semiconductor chip, in which through electrode 20 and alignment markpart 40 are exposed. For insulating layer 62, silicon nitride, forexample, can be used. It is noted that this insulating layer 62 is notshown in FIGS. 1 and 2 for convenience.

Alignment mark part 40 penetrates semiconductor substrate 10. Alignmentmark part 40 may be a metal post including the same metal material asthe metal material of through electrode 20. Thus, alignment mark part 40can be formed by the same process steps of fabricating through electrode20. As a result, fabricating the semiconductor chip is facilitated. Theend of the metal post forming alignment mark part 40 is exposed in thesurface of the semiconductor chip, and used for alignment mark 47 forregistration.

Alignment mark part 40 can be formed of a given conductive member. Thisconductive member 40 may penetrate the semiconductor substrate fromfirst surface 10 a to second surface 10 b. Conductive member 40 is notelectrically connected to semiconductor element 80.

First cylindrical insulating film 30 is formed on semiconductorsubstrate 10, and surrounds through electrode 20. Second cylindricalinsulating film 50 is formed on semiconductor substrate 10, andsurrounds alignment mark part 40. More specifically, cylindricalinsulating film 30 or 50 surrounds through electrode 20 or alignmentmark part 40 in a plane parallel with the surface of the semiconductorchip. In the first embodiment, insulating films 30 and 50 are disposedapart from through electrode 20 or alignment mark part 40. As describedabove, second insulating film 50 forms insulating separator 50 formed ina shape of a ring surrounding conductive member 40.

Preferably, both insulating films 30 and 50 may be made of the samematerial. Thus, both insulating films 30 and 50 can be fabricated by thesame fabricating process steps.

Insulating separator 50 prevents atoms that form conductive member 40,particularly metal atoms, from diffusing into semiconductor substrate10, device region B of the semiconductor substrate particularly.Therefore, it is possible to suppress the deterioration ofcharacteristics of semiconductor element 80 caused by the diffusion ofmetal atoms. From a viewpoint of preventing metal atoms from diffusing,preferably, second insulating film 50 penetrates semiconductor substrate10.

In order to prevent a metal material from diffusing, preferably,insulating films 30 and 50 include silicon nitride films 32 and 52. Morepreferably, insulating films 30 and 50 include silicon oxide films 34and 54 whose surfaces are covered with these silicon nitride films 32and 52. Moreover, insulating film 50 may include a poly-crystallinesilicon film (polysilicon film). In this case, it is possible to furthersuppress the diffusion of metal atoms out of conductive member 40.

The semiconductor chip may have interlayer insulating layer 61, wiringlayer 78, bump electrode 70, plug 77, and so on formed on semiconductorsubstrate 10. Bump electrode 70 is exposed in a surface opposite onesurface of the semiconductor chip, in which through electrode 20 isexposed.

Wiring layer 78 may be formed in a plurality of levels. Interlayerinsulating layer 61 is formed between wiring layer 78 in a certain leveland wiring layer 78 adjacent thereto. Plug 77 extends in interlayerinsulating layer 61. Plug 77 is electrically connected to throughelectrode 20, bump electrode 70, and wiring layer 78.

For the material of wiring layer 78, aluminum, tungsten, or the like canbe used. Here, for an example, wiring layer 78 that makes contact withthrough electrode 20 was made of tungsten, and the other wiring layers78 were made of aluminum. Moreover, preferably, etching stopper layer 48that makes contact with alignment mark part 40 is formed at the samelevel at which wiring layer 78 that makes contact with through electrode20 is located.

Insulating layer 67 made of polyimide and cover layer 66, for example,may be formed on one surface of the semiconductor chip on which bumpelectrode 70 is formed.

This semiconductor chip is preferably for use in a semiconductor devicehaving semiconductor chips stacked on each other. End 47 of conductivemember 40 that forms alignment mark part 40 is used for registration instacking semiconductor chips on each other. A plurality of semiconductorchips may be the same kind of chips, or may be different kinds of chips.End 47 of conductive member 40 can be used for an alignment mark inaligning the semiconductor chip with a given member.

In the embodiment, end 47 of conductive member 40 is exposed only in onesurface of the semiconductor chip. End 47 of conductive member 40 may beexposed in both surfaces of the semiconductor chip, not limited thereto.In this case, preferably, alignment mark part 40 exposed in one surface,on which bump electrode 70 is formed, is made of the same metal materialas the metal material of wiring layer 78 that is located closest to theone surface. In the case where members to be aligned are on both sidesof the chip, alignment mark parts 40 on both surfaces of thesemiconductor chip are effective in cases where, for example, chips areto be stacked in three or more layers.

Alignment mark 47 can be recognized by an imaging device like a camera,for example. An image captured by the imaging device is subject to imageprocessing, so that chips can be accurately aligned with each other by acomputer. The shape of alignment mark part 40 is different from theshape of through electrode 20. Thus, the difference between alignmentmark part 40 and through electrode 20 can be detected. Alignment markpart 40 may have any shape as long as the difference between alignmentmark part 40 and through electrode 20 can be detected.

Next, exemplary process steps of fabricating the semiconductor chip willbe described. In this example, silicon substrate 10 is prepared for asemiconductor substrate. As shown in FIG. 4A, frame-shaped trench 12 isformed on first surface 10 a of semiconductor substrate 10 for forminginsulating separator 50 in a ring. Subsequently, insulating films 30 and50 are formed in trench 12.

More specifically, as shown in FIG. 4B, silicon nitride films 32 and 52are formed on the side wall of trench 12 and first surface 10 a ofsemiconductor substrate 10. Subsequently, silicon oxide films 34 and 54are formed on silicon nitride films 32 and 52 so as to bury the insideof trench 12. For silicon oxide films 34 and 54, an LP-TEOS (LowPressure Si(OC₂H₅)₄) film, for example, can be used.

After that, as shown in FIG. 4C, silicon nitride films 32 and 52 andsilicon oxide films 34 and 54 on first surface 10 a of semiconductorsubstrate 10 are removed, and semiconductor substrate 10 is exposed.Silicon oxide films 34 and 54 and silicon nitride films 32 and 52 can beremoved by etch back or chemical mechanical polishing (CMP), forexample. Thus, insulating films 30 and 50 are formed in trench 12.Insulating film 30 near through electrode 20 and insulating film 50 nearalignment mark part 40 can be collectively formed by the same processsteps.

Subsequently, functional element 80 according to the function of thesemiconductor chip, interlayer insulating layer 61, wiring layer 78,plug 77, cover layer 66, insulating layer 67, and so on are formed onfirst surface 10 a of semiconductor substrate 10 (see FIG. 5A). Here,although wiring layer 78 is formed in a plurality of layers, wiringlayer 78 may be formed in a single layer. Interlayer insulating layer 61is formed between wiring layers 78 at each level. Insulating layer 67 ismade of polyimide, for example. Insulating layer 67 is patterned ascorresponding to a position at which bump electrode 70 is formed, thatis, a position at which plug 77 is formed. It is noted that plugs orbump electrodes are unnecessary in a region in which alignment mark part40 is to be formed.

In the case where the semiconductor chip is a chip for a DRAM, atransistor and a capacitor are formed for functional element 80.Moreover, preferably, etching stopper layer 48 is formed in a region inwhich alignment mark part 40 is to be formed in interlayer insulatinglayer 61.

Preferably, etching stopper layer 48 is formed at the position of wiringlayer 78 that is located closest to first surface 10 a of semiconductorsubstrate 10. More preferably, etching stopper layer 48 is made of thesame metal material as the material for forming this wiring layer 78. Inthis example, tungsten was used for etching stopper layer 48.

As shown in FIG. 5A, seed layer 71 for precipitating plating is formedon plug 77 and insulating layer 67 by sputtering. For seed layer 71, aCu/Ti layer, for example, can be used.

Subsequently, an electrode is formed on seed layer 71. Positive resist90 in a predetermined shape is formed on seed layer 71 byphotolithography, for example, and resist 90 is patterned in such a waythat seed layer 71 on plug 77 is exposed from the resist. Subsequently,an electrode is formed on seed layer 71 exposed from resist 90 byelectroplating.

The electrode can be formed in which metal post 72 made of copper, forexample, is formed in the opening of resist 90, for example, and metalfilm 73 made of SnAg, for example, is formed on the surface of thismetal post 72. In this manner, bump electrode 70 formed of seed layer71, metal post 72, and metal film 73 can be formed. It is noted that thematerial for forming bump electrode 70 is not limited to the exampledescribed above.

After forming bump electrode 70, resist 90 is removed, and seed layer 71exposed in the surface of the semiconductor chip is removed. Afterremoval, the temperature of bump electrode 70 is temporarily increasedto melt only SnAg 22, and then reduced. Thus, as shown in FIG. 5B, thetip end of bump electrode 70 can be projected.

Subsequently, as shown in FIG. 6A, support 69 is attached on bumpelectrode 70 and insulating layer 67 through intermediate layer 68 inorder to process second surface 10 b opposite first surface 10 a ofsemiconductor substrate 10. For intermediate layer 68, a removableadhesive can be used such as an LTHC (Light to Heat Conversion) orUV-cure liquid adhesive, for example. For support 69, a wafer supportsystem made of glass, for example, can be used.

Subsequently, as shown in FIG. 6B, second surface 10 b of semiconductorsubstrate 10 is ground until insulating films 30 and 50 are exposed insecond surface 10 b of semiconductor substrate 10. After grindingsemiconductor substrate 10, second surface 10 b of semiconductorsubstrate 10 is planarized by CMP, for example.

Subsequently, as shown in FIG. 7A, hole 92 for the through electrode andthe alignment mark part is formed on second surface 10 b ofsemiconductor substrate 10. In this formation, preferably, insulatinglayer 62 made of silicon nitride, for example, is formed on secondsurface 10 b of semiconductor substrate 10, resist 91 for forming hole92 is applied, and then hole 92 is formed in semiconductor substrate 10.Silicon nitride for insulating layer 62 prevents a metal material,copper, for example, from diffusing out of second surface 10 b ofsemiconductor substrate 10.

Hole 92 can be formed by dry etching, for example. Preferably, hole 92is formed on the inner side of insulating films 30 and 50, andpenetrates semiconductor substrate 10. In this formation, the depth ofhole 92 is determined by etching stopper layer 48 described above. It issufficient that etching stopper layer 48 is a material resistant againstetching. In order to vary the shape of through electrode 20 from theshape of alignment mark part 40, the shape of the hole for throughelectrode 20 may be varied from the shape of the hole for alignment markpart 40.

Subsequently, as shown in FIG. 7B, resist 91 is removed, and seed layers21 and 41 are formed on the bottom face and side face of hole 92. Seedlayers 21 and 41 can be formed of a Cu/Ti layer, for example. Seedlayers 21 and 41 can be formed by sputtering, for example.

Subsequently, as shown in FIG. 8, through electrode 20 and alignmentmark part 40 are formed in hole 92. More specifically, first, resist 93for shaping through electrode 20 and alignment mark part 40 in apredetermined shape is formed on second surface 10 b of semiconductorsubstrate 10. Subsequently, hole 92 is buried with metal materials 22and 42 by electroplating, for example. For metal materials 22 and 42,copper, for example, can be used. Here, different metal films 23, 43were formed on the surface of metal materials 22, 42 which are filledinto hole 92. Metal films 23 and 43 can be made of Au/Ni byelectroplating, for example. In this manner, conductive member 40 forthrough electrode 20 and alignment mark part 40 are formed, which aremade of seed layers 21 and 41, metal materials 22, 42 and metal films23, 43.

Through electrode 20 may be a through silicon via (TSV) that penetratessilicon as semiconductor substrate 10. Although alignment mark part 40has a shape different from the shape of this through electrode 20,preferably, alignment mark part 40 has a similar structure.

Preferably, through electrode 20 and alignment mark part 40 are made ofthe same metal material, as described above. In this case, throughelectrode 20 and alignment mark part 40 can be formed at the same timeby the same process steps.

Next, resist 93 is removed, and unnecessary seed layer 21 on insulatinglayer 62 is removed. Subsequently, intermediate layer 68 and support 69are removed, so that the semiconductor chip shown in FIGS. 1 to 3 can befabricated.

In the following, a semiconductor chip according to a second embodimentwill be described with reference to FIG. 9. FIG. 9 is a plan viewillustrating the configurations of portions around a through electrodeand an alignment mark part of the semiconductor chip according to thesecond embodiment.

In the semiconductor chip according to the second embodiment, theconfigurations of through electrode 20 and the alignment mark part forforming alignment mark 47 are the same as the configurations in thesemiconductor chip according to the first embodiment. Insulating films30 and 50 surround through electrode 20 or the alignment mark part.However, insulating film 50 for the insulating separator is formed of asmooth closed curve with no corners in a plane parallel with the surfaceof semiconductor substrate 10. Corners at which cracks tend to beproduced are eliminated, so that it is possible to maintain the effectof insulating film 50 that prevents metal atoms from diffusing.

In the following, a semiconductor chip according to a third embodimentwill be described with reference to FIG. 10. FIG. 10 is a plan viewillustrating the configurations of portions around through electrode 20and an alignment mark part of the semiconductor chip according to thethird embodiment. However, in FIG. 10, an insulating layer formed on thesurface of semiconductor substrate 10 is not deposited in order toclarify the configuration of the chip.

In the third embodiment, the configurations of through electrode 20 andthe alignment mark part forming alignment mark 47 are the same as theconfigurations in the semiconductor chip according to the firstembodiment. Insulating films 30 and 50 surround through electrode 20 oralignment mark part 40. In this embodiment, insulating films 30 and 50form a side wall that makes contact with through electrode 20 oralignment mark part 40 (also see FIG. 13B). Also in this case,insulating film 50 that forms an insulating separator can prevent metalatoms from diffusing out of metal material forming alignment mark part40.

Next, a method for fabricating the semiconductor chip according to thethird embodiment will be described. First, as similar to the firstembodiment, semiconductor substrate 10 is prepared. Here, the processesshown in FIGS. 4A to FIG. 4C, that is, the processes for forming aninsulating film in a ring on first surface 10 a of semiconductorsubstrate 10 are not performed. As shown in FIGS. 5A and 5B, functionalelement 80, plug 77, bump electrode 70, and so on are then formed (alsosee FIG. 11). Subsequently, support 69 is attached on the surface ofbump electrode 70 and insulating layer 67 through intermediate layer 68in order to process second surface 10 b of semiconductor substrate 10.In this configuration, as similar to the first embodiment, etchingstopper layer 48 is formed in interlayer insulating layer 61. Thus, achip shown in FIG. 11 can be obtained.

Subsequently, as shown in FIG. 12A, hole 92 for the through electrodeand the alignment mark part is formed on second surface 10 b ofsemiconductor substrate 10. Subsequently, insulating films 30 and 50 areformed on the bottom face and side wall of hole 92. In this formation,hole 92 may be formed after forming an insulating layer made of siliconnitride, for example, on second surface 10 b of semiconductor substrate10. Preferably, the depth of hole 92 penetrates semiconductor substrate10. In this formation, the depth of hole 92 is determined by etchingstopper layer 48.

Subsequently, silicon nitride films 32 and 52 and silicon oxide films 34and 54 are formed on the bottom face and side face of hole 92. In thismanner, insulating films 30 and 50 formed of silicon nitride films 32and 52 and silicon oxide films 34 and 54 are formed. Subsequently, extrasilicon oxide films 34 and 54 and/or silicon nitride films 32 and 52 onsecond surface 10 b of semiconductor substrate 10 are removed by an etchback process, as necessary (see FIG. 12B). In this removal, preferably,silicon nitride films 32 and 52 in a predetermined thickness are left onsecond surface 10 b of semiconductor substrate 10.

As shown in FIG. 13A, seed layers 21 and 41 that form a part of thethrough electrode and the alignment mark part are formed on the surfacesof silicon oxide films 34 and 54 in hole 92. Seed layers 21 and 41 canbe formed of a Cu/Ti layer, for example. Seed layers 21 and 41 can beformed by sputtering, for example.

Subsequently, as shown in FIG. 13B, hole 92 is buried with metalmaterials 22 and 42, and through electrode 20 and alignment mark part 40are formed. More specifically, first, resist 93 for shaping the throughelectrode and the alignment mark part in a predetermined shape is formedon semiconductor substrate 10. Subsequently, metal materials 22 and 42are formed in hole 92 by electroplating, for example. For metalmaterials 22 and 42, copper, for example, can be used. Here, hole 92 wasburied with copper, and metal films 23 and 43 were formed on the surfaceof copper. For metal films 23 and 43, Au/Ni, for example, can be used,and metal films 23 and 43 can be formed by electroplating. In thismanner, through electrode 20 or alignment mark part 40, formed of seedlayers 21 and 41, metal materials 22 and 42 and metal films 23 and 43,is formed.

As described above, preferably, through electrode 20 and alignment markpart 40 are made of the same metal material. In this case, throughelectrode 20 and alignment mark part 40 can be formed at the same timeby the same process steps.

Subsequently, resist 93 and unnecessary seed layers 21 and 41 areremoved, and intermediate layer 68 and support 69 are removed, so thatit is possible to fabricate the semiconductor chip according to thethird embodiment.

Next, a semiconductor device including the aforementioned semiconductorchips stacked on each other will be described. FIG. 14A showssemiconductor device 200 having four semiconductor chips 100 a to 100 dstacked on each other. FIG. 14B is an enlarged diagram illustratingregion 14 b in FIG. 14A.

As shown in FIG. 14A, semiconductor chips 100 a to 100 d are stacked oneach other. First, second semiconductor chip 100 b is mounted on firstsemiconductor chip 100 a. In this mounting, second semiconductor chip100 b is stacked on first semiconductor chip 100 a while aligning secondsemiconductor chip 100 b using conductive member 40 exposed in thesurface of semiconductor substrate 10 in first semiconductor chip 100 a.Thus, bump electrode 70 of first semiconductor chip 100 a is joined tothrough electrode 20 of second semiconductor chip 100 b through aconductive joining material, solder 150, for example.

First semiconductor chip 100 a and second semiconductor chip 100 b arethen heated at the melting point of solder 150, or more, at atemperature of about 300° C., for example, for reflowing solder 150,while pressing first semiconductor chip 100 a against secondsemiconductor chip 100 b at a constant pressure. As described above,through electrodes 20 of semiconductor chips 100 a and 100 b areelectrically connected to each other, and wiring layers 78 ofsemiconductor chips 100 a and 100 b are also electrically connected toeach other. A pressure (load) applied in joining the chips to each othermay be applied to the extent that the pressure does not affect internalstructures formed in semiconductor chips 100 a and 100 b.

It is noted that in joining semiconductor chips 100 a and 100 b to eachother, conductor 40 used for the alignment mark of first semiconductorchip 100 a is not electrically connected to second semiconductor chip100 b.

Similarly, third semiconductor chip 100 c is mounted on secondsemiconductor chip 100 b, and then fourth semiconductor chip 100 d ismounted on third semiconductor chip 100 c.

Subsequently, underfill resin 110 is filled between semiconductor chips100 a to 100 d. Subsequently, through electrode 20 for an externalterminal formed on semiconductor chip 100 a of the lowermost level isconnected to package substrate 130. Subsequently, ball grid array (BGA)140 formed of mold resin 120 and a solder ball is formed. Thus,semiconductor device 200 shown in FIG. 14A is completed.

The uppermost semiconductor chip 100 d may receive signals and powersupplied from terminal 70 of semiconductor chip 100 c through terminal160 of chip 100 d of semiconductor chip 100 c. It is not necessary forthe uppermost semiconductor chip 100 d to supply signals supplied fromterminal 70 of semiconductor chip 100 c to the other semiconductorchips. Therefore, through electrode 20 does not need to be formed inuppermost semiconductor chip 100 d. As described above, in the casewhere through electrode 20 is not formed in semiconductor chip 100 d, itis unnecessary to reduce the thickness of the chip to facilitate theformation of through electrode 20. Therefore, the thickness of uppermostsemiconductor chip 100 d can be made thicker than the thicknesses ofother semiconductor chips 100 a to 100 c. As a result, it is possible tosuppress the deformation of the chips caused by thermal stress infabricating semiconductor device 200, more specifically, in mountinguppermost semiconductor chip 100 d on semiconductor chip 100 c.

It is noted that in FIG. 14A, semiconductor device 200 is taken as anexample, having four semiconductor chips 100 a to 100 d stacked on eachother. However, the present invention is applicable to semiconductordevices having two semiconductor chips or more stacked on each other. Asdescribed above, also in semiconductor devices having semiconductorchips stacked on each other, except for semiconductor devices havingfour semiconductor chips stacked on each other, the foregoingconfigurations are applicable. Namely, in such semiconductor devices,the thickness of a semiconductor chip stacked at the uppermost level canbe increased more than the thicknesses of the other semiconductor chipswithout forming through electrodes and terminals in the semiconductorchip stacked at the uppermost level.

From a viewpoint that all the semiconductor chips can be formed in asimilar configuration, the uppermost semiconductor chip may have throughelectrodes and terminals that are similar to the other semiconductorchips. The foregoing advantages can also be obtained by applying theinvention of the present application to such semiconductor devices.

While preferred embodiments of the present invention have been describedusing specific terms, such description is for illustrative purposesonly, and it is to be understood that changes and variations may be madewithout departing from the spirit or scope of the following claims.

What is claimed is:
 1. A semiconductor device comprising: asemiconductor substrate having a first surface and a second surfacelocated opposite to each other in a thickness direction; a semiconductorelement formed on the first surface of the semiconductor substrate; athrough electrode penetrating the semiconductor substrate from the firstsurface to the second surface and electrically connected to thesemiconductor element; a conductor penetrating the semiconductorsubstrate from the first surface to the second surface and notelectrically connected to the semiconductor element; and an insulatingseparator penetrating the semiconductor substrate from the first surfaceto the second surface and formed in a shape of a ring surrounding theconductor.